at-900ebi Optical Vacuum Coating System for Superior Surface Finishing

1 / 5

at-900ebi Optical Vacuum Coating System for Superior Surface Finishing

Customization:	Available
After-sales Service:	One Year Warranty
Warranty:	One Year Warranty

Send Inquiry

Product Description

Basic Information

Model NO.AT-61124

ApplicationMetal

Numerical ControlCNC/MNC

Processing Precision0.01~0.02(mm)

CertificationISO 9001

ConditionNew

Working Principle

⚙️

The vacuum system evacuates the chamber to a high vacuum (≤7×10-5 Pa).
The substrate holder rotates (revolves/rotates) to ensure uniform coating.
High-energy electron beams (270° magnetic deflection) bombard the coating material, causing it to evaporate and uniformly deposit onto the substrate.
The film thickness monitoring system (optical + quartz crystal oscillation) provides real-time, precise control over the thickness.
After deposition is complete, the finished product is cooled and removed.

Product Features

💡

High Energy Density: Capable of evaporating materials with melting points up to 3000ºC (e.g., Ta2O5, SiO2).
Superior Purity & Uniformity: Excellent density with thickness error < 1nm.
Precision Monitoring: Dual-mode (optical + quartz crystal) monitoring for nanometer-level control accuracy.
High-Efficiency Evaporation:
- Self-developed stable electron gun with rates up to 10nm/s.
- Four-crucible design for simultaneous loading of multiple materials.
Advanced Automation: Fully automatic PLC control with "one-click" initiation and preset process recipes.
Multifunctional Configuration: Optional Hall ion source for enhanced adhesion and hardness.

Application Areas

🚀

Optical Imaging: Anti-reflection (AR) coatings for lenses, telescope mirrors, and beam splitters (transmittance > 99%).
Display & Optoelectronics: AR/VR glass composite films, scratch-resistant mobile displays (up to 9H), and OLED protective films.
Industrial Applications: High-damage-threshold coatings for laser mirrors, solar panels, and precision moisture-proof components.

Product Parameters

AT-900EBI Optical Vacuum Coating Machine
Chamber Inner Dimensions: φ900mm * H1100mm	Vacuum System: Molecular pump + Rotary vane pump + Roots pump
Crystal Control: MXC-3B + Six Probes	Evaporation Sources: Dual guns + Fixed resistance evaporation
Ultimate Vacuum (Empty): 8.0x10^-5 Pa	Pump-down Time: ≤15 min (to 2x10^-3 Pa)
Max Heating Temp: 300ºC	Options: Ion source, POLYCOLD
Power Supply: Three-phase 380V 50Hz	Equipment Weight: Approx. 2T

Note: Chamber dimensions and pump configurations can be customized based on specific coating processes.

Technical Capabilities

Specializing in technical services, technology development, and promotion within the optical and semiconductor sectors. Expertise includes the sales and production of functional glass, new optical materials, optical instruments, and specialized equipment for semiconductor devices. Providing comprehensive solutions for CNC machine tools, experimental analysis instruments, and electronic components including fiber optics and photovoltaic equipment.

Detailed Photos

Frequently Asked Questions

What is the maximum melting point of materials this machine can handle?

The high-energy electron beam evaporation system is capable of processing materials with melting points up to 3000ºC, such as Ta2O5 and SiO2.

How accurate is the film thickness control?

By utilizing a dual-mode monitoring system (Optical + Quartz Crystal oscillation), the machine achieves nanometer-level precision with a thickness error of less than 1nm.

How long does it take to reach the working vacuum level?

The system features a high-efficiency pump configuration (Molecular, Rotary Vane, and Roots pumps) that can reach 2x10^-3 Pa in 15 minutes or less.

Can the system be used for AR/VR glasses?

Yes, it is ideal for fabricating anti-reflection and anti-glare composite films specifically designed for AR/VR hardware and other high-end display optics.

Does the machine support automated production?

Yes, it features a fully automatic PLC control system that allows for preset process recipes and one-click initiation for complex coating sequences.

What materials can be used as substrates?

The system is versatile and supports various substrates for optical imaging, mobile phone displays, solar panels, and precision industrial components.